Hybrid Navier-Stokes/DSMC gas flow simulations in very low pressure thin film deposition
Conference Paper
(2007)
Author(s)
G Abbate (TU Delft - MSP/Thermal & Materials Processes)
Barend J. Thijsse (TU Delft - OLD Virtual Materials and Mechanics)
Chris Kleijn (TU Delft - MSP/Thermal & Materials Processes)
Research Group
MSP/Thermal & Materials Processes
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https://resolver.tudelft.nl/uuid:259ce4b4-29ec-4fd1-83be-b1bd30e02ac8
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Publication Year
2007
Research Group
MSP/Thermal & Materials Processes
Pages (from-to)
830-835
ISBN (print)
978-5-7692-0924-6
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