Hybrid Navier-Stokes/DSMC gas flow simulations in very low pressure thin film deposition

Conference paper (2007)

Authors

G Abbate MSP/Thermal & Materials Processes
B.J. Thijsse OLD Virtual Materials and Mechanics
C.R. Kleijn MSP/Thermal & Materials Processes
Research Group
MSP/Thermal & Materials Processes
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Published Date

2007

Language

Undefined/Unknown

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Research Group

MSP/Thermal & Materials Processes