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Piezo-driven stages for nanopositioning with extreme stability

Theoretical acpects and practical design considerations

Doctoral thesis (1997)

Contributors

H.F. Van Beek (promotor)
Faculty
Mechanical Maritime and Materials Engineering
Copyright: © 1997 H. van der Wulp
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Published Date

08-12-1997

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Faculty

Mechanical Maritime and Materials Engineering

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3me_wulp_19971208.PDF
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