Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides

Conference Paper (2022)
Author(s)

Christian De Vita (Politecnico di Milano)

Charalambos Klitis (University of Glasgow)

Nina Codreanu (Politecnico di Milano, TU Delft - QN/Quantum Nanoscience, TU Delft - QID/Hanson Lab, Kavli institute of nanoscience Delft)

Giorgio Ferrari (Politecnico di Milano)

Marc Sorel (University of Glasgow)

Andrea Melloni (Politecnico di Milano)

Francesco Morichetti (Politecnico di Milano)

DOI related publication
https://doi.org/10.1109/GFP51802.2021.9673949 Final published version
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Publication Year
2022
Language
English
ISBN (electronic)
978-1-6654-2224-6
Event
17th IEEE International Conference on Group IV Photonics, GFP 2021 (2021-12-07 - 2021-12-10), Virtual, Online, Spain
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Abstract

This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.

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