A comparative study of the strength of Si, SiN and SiC used at nanoscales
Conference Paper
(2007)
Author(s)
T Alan (TU Delft - Old - EWI Sect. ECTM)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:2aa7f9d5-1ec5-4558-b3e0-2f2997ae6c86
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Publication Year
2007
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
395-398
ISBN (print)
978-90-73461-49-9
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