Comparison between different imaging modes in focussed ion beam instruments
Journal Article
(1996)
Author(s)
XR Jiang (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:2ba10b3f-6362-4323-8034-9602b7ca8c60
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Publication Year
1996
Research Group
ImPhys/Charged Particle Optics
Volume number
30
Pages (from-to)
249-252
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