Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.

Zijlstra, T; van der Drift, E.W.J.M.; de Dood, MJA; Snoeks, E; Polman, A.

Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.

Conference paper (1999)

Authors

T Zijlstra QN/Kavli Nanolab Delft

E.W.J.M. van der Drift QN/Kavli Nanolab Delft

MJA de Dood External organisation

E Snoeks External organisation

A. Polman External organisation

Research Group

QN/Kavli Nanolab Delft

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Published Date

1999

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Research Group

QN/Kavli Nanolab Delft

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