The Near Field Characteristics of teh Focused Field Embedded in the Super-RENS Layer Applied to Lithography
Journal Article
(2012)
Author(s)
A da Costa Assafrao (TU Delft - ImPhys/Optics)
Silvania Pereira (TU Delft - ImPhys/Optics)
Paul Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.1117/12.916368
To reference this document use:
https://resolver.tudelft.nl/uuid:2d223362-584f-435d-83a0-b378d7d76436
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Publication Year
2012
Language
English
Research Group
ImPhys/Optics
Volume number
8326
Pages (from-to)
1-7
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