The Near Field Characteristics of teh Focused Field Embedded in the Super-RENS Layer Applied to Lithography

Journal Article (2012)
Author(s)

A da Costa Assafrao (TU Delft - ImPhys/Optics)

Silvania Pereira (TU Delft - ImPhys/Optics)

Paul Urbach (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.1117/12.916368
More Info
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Publication Year
2012
Language
English
Research Group
ImPhys/Optics
Volume number
8326
Pages (from-to)
1-7

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