A Novel High-temperature Pressure Sensor Based on Graphene Coated by Si3N4

Journal article (2023)

Authors

Simei Zeng Beijing Jiaotong University
Chenggang Tang Beijing Jiaotong University
H. Hong Electronic Components, Technology and Materials - EEMCS
Fang Yuan Beijing Jiaotong University
Yuning Li Beijing Jiaotong University
Yuqiang Wang Beijing Jiaotong University
Lingbing Kong Beijing Jiaotong University
Jingye Sun Beijing Jiaotong University
Mingqiang Zhu Beijing Jiaotong University
Tao Deng Beijing Jiaotong University
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2023 Simei Zeng, Chenggang Tang, H. Hong, Fang Yuan, Yuning Li, Yuqiang Wang, Lingbing Kong, Jingye Sun, Mingqiang Zhu, Tao Deng
DOI
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https://doi.org/10.1109/JSEN.2022.3232626
Graphene High-temperature Si3N4 Piezoresistive characteristic
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Published Date

2023

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials