Elastic deformation of silicon (001) wafers due to thin film stresses
Journal Article
(2007)
Authors
G.C.A.M. Janssen (OLD Surface and Interface Engineering)
BR Pujada Bermudez (OLD Surface and Interface Engineering)
Research Group
OLD Surface and Interface Engineering
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https://resolver.tudelft.nl/2ec11592-0eb0-4e88-b85b-9f86f3069d12
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Publication Year
2007
Research Group
OLD Surface and Interface Engineering
Volume number
91
Pages (from-to)
121913-1-121913-3
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