Temperature dependence of chemical-vapor deposition of pure boron layers from diborane
Journal Article
(2012)
Author(s)
Vahid Mohammadi (TU Delft - Electronic Components, Technology and Materials)
Wiebe de Boer (TU Delft - Old - EWI Sect. ECTM)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1063/1.4752109
To reference this document use:
https://resolver.tudelft.nl/uuid:2fcc91fe-bd52-4394-9298-3379a3ab42a5
More Info
expand_more
expand_more
Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
11
Volume number
101
Pages (from-to)
1-5
No files available
Metadata only record. There are no files for this record.