Temperature dependence of chemical-vapor deposition of pure boron layers from diborane

Journal Article (2012)
Author(s)

Vahid Mohammadi (TU Delft - Electronic Components, Technology and Materials)

Wiebe de Boer (TU Delft - Old - EWI Sect. ECTM)

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1063/1.4752109
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
11
Volume number
101
Pages (from-to)
1-5

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