Opto-Mechanical Ultrasound Sensors in Silicon Photonics (invited)

Abstract (2022)

Authors

W.J. Westerveld Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Rami Shnaiderman Helmholtz Zentrum München, Technische Universität München
Vasilis Ntziachristos Technische Universität München, Helmholtz Zentrum München
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2022

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

We present sensitive ultrasound sensors with an innovative silicon photonic optomechanical waveguide that features a 15-nm gap between movable parts [Nature Photonics 15, 341 (2021)]. Sensors are fabricated using CMOS-compatible processing and tested for biomedical imaging.