Opto-Mechanical Ultrasound Sensors in Silicon Photonics (invited)

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Opto-Mechanical Ultrasound Sensors in Silicon Photonics (invited)

Abstract (2022)

Author(s)

W.J. Westerveld (TU Delft - Dynamics of Micro and Nano Systems)

Md. Mahmud-Ul-Hasan (IMEC)

Cedric Pieters (IMEC)

Jon Kjellman (IMEC)

Rami Shnaiderman (Technische Universität München, Helmholtz Zentrum München)

Vasilis Ntziachristos (Helmholtz Zentrum München, Technische Universität München)

Roelof Jansen (IMEC)

Simone Severi (IMEC)

Veronique Rochus (IMEC)

Xavier Rottenberg (IMEC)

Research Group

Dynamics of Micro and Nano Systems

To reference this document use:

https://resolver.tudelft.nl/uuid:2fce9bb3-fdbd-4269-863c-481a363bb665

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Publication Year

2022

Language

English

Research Group

Dynamics of Micro and Nano Systems

Event

CLEO: Applications and Technology, A and T 2022 (2022-05-15 - 2022-05-20), San Jose, United States

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Abstract

We present sensitive ultrasound sensors with an innovative silicon photonic optomechanical waveguide that features a 15-nm gap between movable parts [Nature Photonics 15, 341 (2021)]. Sensors are fabricated using CMOS-compatible processing and tested for biomedical imaging.

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