The 3-D Hall-effect sensor optimized thru backside deep etching

Conference paper (2005)

Authors

LB Hebrard Electronic Instrumentation - EEMCS
G. Pandraud Electronic Instrumentation - EEMCS
JB kammerer External organisation
D Tanase Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation