The 3-D Hall-effect sensor optimized thru backside deep etching
Conference Paper
(2005)
Author(s)
LB Hebrard (TU Delft - Electronic Instrumentation)
Gregory Pandraud (TU Delft - Electronic Instrumentation)
JB kammerer (External organisation)
D Tanase (TU Delft - Electronic Instrumentation)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:2fe8187c-a671-490d-99c6-40da33738e33
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Publication Year
2005
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
ISBN (print)
84-475-2984-3
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