Suspended submicron silicon-beam for high sensitivity piezoresistive sensing
Conference Paper
(2011)
Author(s)
J Wei (TU Delft - Electronic Components, Technology and Materials)
S Magnani (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
DOI related publication
https://doi.org/10.1016/j.proeng.2011.12.355
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:305745ba-61be-4b28-949c-903f64537de4
More Info
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Publication Year
2011
Language
English
Pages (from-to)
1437-1440
Publisher
Elsevier
Event
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