Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining
Conference Paper
(2003)
Author(s)
Gleb Vdovin (TU Delft - Electronic Instrumentation)
O Akhzar-Mehr (External organisation)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
DW de Lima Monteiro (TU Delft - Electronic Instrumentation)
M Loktev (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:307031e3-3109-43be-9033-c04055dec55e
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Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
107-111
ISBN (print)
0-8194-4740-4
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