In-package MEMS-based thermal actuators for micro-assembly

Journal article (2006)
Faculty
Mechanical Maritime and Materials Engineering (Mechanical Maritime and Materials Engineering) (TU Delft)
Copyright: © 2006 Henneken, V.A.; Tichem, M.; Sarro, P.M.
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Published Date

2006

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Source:

Journal of Micromechanics and Microengineering, 16 (6)

Faculty

Mechanical Maritime and Materials Engineering

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