Irreversible Kinetics in CVD: A Reinterpretation of titanium Nitride and Tungsten Formation
Journal Article
(1999)
Author(s)
PJ van der Put (External organisation)
JAM Ammerlaan (External organisation)
JP Dekker (External organisation)
J. Schoonman (TU Delft - Old - sect Laboratory Inorganic Chemistry (DCT/AC))
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
To reference this document use:
https://resolver.tudelft.nl/uuid:32fdba48-fc94-4b65-afaf-2e8758e1749a
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Publication Year
1999
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Volume number
5
Pages (from-to)
211-218
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