Irreversible Kinetics in CVD: A Reinterpretation of titanium Nitride and Tungsten Formation

Journal article (1999)

Authors

PJ van der Put External organisation
JAM Ammerlaan External organisation
JP Dekker External organisation
J. Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)