Fabrication of an integrated silicon infrared micro-spectrometer

Conference paper (2000)

Authors

SH Kong Electronic Instrumentation - EEMCS
DDL Wijngaards Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2000

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation