Numerical modeling of the electromechanical interaction in MEMS
Book Chapter
(2009)
Author(s)
SDA Hannot (TU Delft - Dynamics of Micro and Nano Systems)
D.J. Rixen (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
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https://resolver.tudelft.nl/uuid:3331a44e-499e-42aa-97da-c1b56865a553
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Publication Year
2009
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
315-342
ISBN (print)
978-3-642-03344-5
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