Non-parametric robustness analysis for feedback motion control for a high precision stage with large mass uncertainty

Conference paper (2016)

Authors

R. Saathof Technische Universität Wien
Thomas Riel Technische Universität Wien
Matthias Bibl Technische Universität Wien
Dominik Kohl Automation and Control Institute, Technische Universität Wien
Han Woong Yoo Technische Universität Wien, Automation and Control Institute
Georg Schitter Technische Universität Wien
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Published Date

2016

Language

English

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Abstract

Robust feedback control with large parameter uncertainties in a high precision stage with large sample mass variation is presented. Instead of expressing the nominal plant and its uncertainty by parametric models, they are expressed using the identified frequency response data. The open loop transfer function is mapped onto a Nyquist plot, to assess robust stability. Next, the complementary sensitivity function is derived from this data to describe tracking performance, which is verified by experiments. The advantage is that the parameter estimation step is omitted, without compromising robust stability and performance.