MEMS silicon-based micro-evaporator with diamond-shaped fins
Conference Paper
(2010)
Author(s)
M Mihailovic (TU Delft - Electronic Components, Technology and Materials)
C Rops (External organisation)
JF Creemer (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.proeng.2010.09.270
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:36ce3330-15fa-4206-bfdc-5c0d8f139744
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
969-972
Publisher
Elsevier
Event
Eurosensors XXIV (2010-09-05 - 2010-09-08), Linz, Austria
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