MEMS silicon-based micro-evaporator with diamond-shaped fins

Mihailovic, M; Rops, C; Creemer, J.F.; Sarro, P. M.

MEMS silicon-based micro-evaporator with diamond-shaped fins

Conference paper (2010)

Authors

M Mihailovic Electronic Components, Technology and Materials

C Rops External organisation

J.F. Creemer Electronic Components, Technology and Materials

P. M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2010

Language

English

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Research Group

Electronic Components, Technology and Materials

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