Transient sputtering of silicon by argon studied by molecular dynamics simulations

Journal Article (2003)
Author(s)

EFC Haddeman (TU Delft - OLD Virtual Materials and Mechanics)

BJ Thijsse (TU Delft - OLD Virtual Materials and Mechanics)

Research Group
OLD Virtual Materials and Mechanics
More Info
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Publication Year
2003
Research Group
OLD Virtual Materials and Mechanics
Volume number
202
Pages (from-to)
161-167

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