Alignment control of STEM:a Ronchigram based approach

Abstract (2009)

Authors

SW van der Hoeven DISC - Mechanical, Maritime and Materials Engineering

A.J. den Dekker Team Michel Verhaegen - Mechanical, Maritime and Materials Engineering , DISC - Mechanical, Maritime and Materials Engineering

A. Tejada Ruiz DISC - Mechanical, Maritime and Materials Engineering

Research Group

DISC (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2009

Language

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

DISC