Low-loss Silicon MEMS Phase Shifter at 550 GHz

Conference Paper (2019)
Author(s)

S. Rahiminejad (California Institute of Technology)

M. Alonso del Pino (California Institute of Technology)

C. Jung-Kubiak (California Institute of Technology)

T. Reck (Virginia Diodes Inc.)

G. Chattopadhyay (California Institute of Technology)

Affiliation
External organisation
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Publication Year
2019
Language
English
Affiliation
External organisation
Event
2019 30th International Symposium on Space Terahertz Technology, ISSTT 2019 (2019-04-15 - 2019-04-17), Gothenburg, Sweden
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