Mono crystalline silicon microhotplate heater
Conference Paper
(2008)
Author(s)
M Mihailovic (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Old - EWI Sect. ECTM)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:3a40680c-0055-4d43-b985-99c98355a802
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1611-1614
ISBN (print)
978-3-00-025217-4
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