Mechanism of incongruent ablation of SrTiO<sub>3</sub>

Journal article (1998)

Authors

B. Dam Vrije Universiteit Amsterdam, Institute COMPAS

Jan H. Rector Vrije Universiteit Amsterdam

J. Johansson Vrije Universiteit Amsterdam

J. M. Huijbregtse Vrije Universiteit Amsterdam

D. G. de Groot Institute COMPAS, Vrije Universiteit Amsterdam

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Published Date

1998

Language

English

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Abstract

At low fluences, the [Sr]/[Ti] ratio of laser deposited SrTiO3 films appears to be a function of the laser fluence. The deviation from stoichiometry is remarkably constant in time. From an analysis of both the composition of the film and the irradiated target, we deduce a volume-diffusion-assisted preferential ablation process. At high fluences (above 1.3 J/cm2), stoichiometric SrTiO3 films are obtained. This is not due to a change in ablation mechanism, but follows from the fact that at 1.3 J/cm2 the calculated diffusion length of Sr within the irradiated target, becomes of the order of the ablation rate per shot.