Ring-gate MOSFET test structures for measuring surface-charge-layer sheet resistance on high-resistivity-silicon substrates
Conference Paper
(2006)
Author(s)
SB Ir. Evseev (External organisation)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
S. Milosavljevic (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:3bbca448-f031-4a05-a7a8-bb5da6c1e534
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
3-8
ISBN (print)
1-4244-0167-4
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