Ring-gate MOSFET test structures for measuring surface-charge-layer sheet resistance on high-resistivity-silicon substrates

Conference Paper (2006)
Author(s)

SB Ir. Evseev (External organisation)

Lis Nanver (TU Delft - Electronic Components, Technology and Materials)

S. Milosavljevic (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
3-8
ISBN (print)
1-4244-0167-4

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