All-SIC surface micromachined nanoreactor for in-situ transmission electron microscopy

Conference Paper (2016)
Authors

B Morana (TU Delft - EKL-Users)

Cinzia Silvestri (TU Delft - Tera-Hertz Sensing)

JF Creemer (TU Delft - EEMS - General)

Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
EKL-Users
To reference this document use:
https://doi.org/10.1109/MEMSYS.2016.7421738
More Info
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Publication Year
2016
Language
English
Research Group
EKL-Users
Pages (from-to)
753-756
ISBN (print)
978-1-5090-1973-1
DOI:
https://doi.org/10.1109/MEMSYS.2016.7421738

Abstract

We present a silicon carbide (SiC) based surface micromachined nanoreactor for in-situ characterization of reactions between solid nanostructured materials and gasses in transmission electron microscopes (TEMs). For the first time SiC is used as construction material for this device and a novel design of gas-microchannel with a two-level height is implemented. The use of SiC compared to the standard construction materials allows for easier and more reliable fabrication of the complete microsystem and for improved performance in terms of temperature. Additionally, the two-level height channel eases the loading of the specimens without affecting the sensitivity in the gas analysis.

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