Design of an Electron Projection System with Slider Lenses and Multiple Beams

Conference paper (2002)

Authors

D Moonen ImPhys/Charged Particle Optics
LHA Leunissen ImPhys/Charged Particle Optics
PWH de Jager External organisation
P. Kruit ImPhys/Charged Particle Optics
AJ Bleeker External organisation
KD van der Mast External organisation
Research Group
ImPhys/Charged Particle Optics
More Info
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Published Date

2002

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics