Design of an Electron Projection System with Slider Lenses and Multiple Beams
Conference Paper
(2002)
Author(s)
D Moonen (TU Delft - ImPhys/Charged Particle Optics)
LHA Leunissen (TU Delft - ImPhys/Charged Particle Optics)
PWH de Jager (External organisation)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
AJ Bleeker (External organisation)
KD van der Mast (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:3c531908-37e5-41a4-aa47-0efa8b1b5797
More Info
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Publication Year
2002
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
932-943
ISBN (print)
0-8194-4434-0
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