Compact Current-Spun 3D Magnetic Field Sensing Modes for an Inverted Pyramid Hall-Effect Sensor
J. Ruggeri (TU Delft - Electronic Instrumentation)
U. Ausserlechner (Infineon Technologies)
H. Köck (Infineon Technologies)
K. M. Dowling (TU Delft - Electronic Instrumentation)
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Abstract
This paper reports two novel sensing modes for the 3axis Hall-effect sensor based on an inverted pyramid structure. The proposed current-spinning schemes enable 3-axis magnetic field measurements with reduced readout complexity (6 less switching phases for 3D1) while preserving sensitivity and offset. Residual offsets in the millitesla range at 1 V supply voltage were measured on three identical samples using 6 - or 12 -phase current spinning sequences, with in-plane voltage and currentrelated sensitivities up to $16.7 \text{mV} / \mathrm{V} / \mathrm{T}$ and $86.1 ~\mathrm{V} / \mathrm{A} / \mathrm{T}$, respectively. These modes represent a more efficient and simpler readout method for the pyramid sensor, while remaining competitive with the state-of-the-art.
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