Design of a magnification and Rotation Unit with Pre-design Tool POCAD

Conference Paper (1997)
Authors

P. Kruit (ImPhys/Charged Particle Optics)

BM Mertens (ImPhys/Charged Particle Optics)

MAJ van der Stam (ImPhys/Charged Particle Optics)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
1997
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
22-36

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