Power Efficient V-Shape Electro-Thermal Actuator Using Constrained SU-8

Conference paper (2007)

Authors

GK Lau Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
T Chu Duc Electronic Components, Technology and Materials - EEMCS
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-µm long, 56-µm wide, 60-µm high, 15 degrees bent) demonstrates a large in-plane motion (10 µm) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125 degrees Centigrade). It is estimated to produce a blocked apex force of 100 mN at 1.75 V.