Two-step glass wet-etching for micro-fluidic devices
Conference Paper
(2000)
Author(s)
A Berthold (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
MJ Vellekoop (TU Delft - Electronic Instrumentation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:3e3fcd27-72fd-43ae-a01d-990a350f532a
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
613-616
ISBN (print)
90-73461-24-3
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