SU-8 structures for integrated high-speed screening
Conference Paper
(2002)
Author(s)
BL Gray (TU Delft - ImPhys/Quantitative Imaging)
VP Iordanov (TU Delft - ImPhys/Quantitative Imaging)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
A Bossche (TU Delft - Electronic Instrumentation)
Research Group
ImPhys/Quantitative Imaging
To reference this document use:
https://resolver.tudelft.nl/uuid:3eee1efb-55f0-45db-a9ed-96cae27ff108
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Publication Year
2002
Research Group
ImPhys/Quantitative Imaging
Pages (from-to)
464-466
ISBN (print)
1-4020-1009-5
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