Surface kinetics in copper CVD.

Journal article (2001)

Authors

MLH ter Heerdt External organisation
PJ van der Put External organisation
J. Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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Published Date

2001

Language

Undefined/Unknown

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)