Surface kinetics in copper CVD.
Journal Article
(2001)
Author(s)
MLH ter Heerdt (External organisation)
PJ van der Put (External organisation)
J. Schoonman (TU Delft - Old - sect Laboratory Inorganic Chemistry (DCT/AC))
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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Publication Year
2001
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Issue number
5
Volume number
7
Pages (from-to)
199-203
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