Electrostatic coupling of MEMS structures: transient simulations and dynamic pull-in
Journal Article
(2005)
Author(s)
V. Rochus (External organisation)
Daniel Rixen (TU Delft - Dynamics of Micro and Nano Systems)
JC Golinval (External organisation)
Research Group
Dynamics of Micro and Nano Systems
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Publication Year
2005
Research Group
Dynamics of Micro and Nano Systems
Volume number
63
Pages (from-to)
1619-1633
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