Spatial resolution limits in electron-beam-induced deposition
Journal Article
(2005)
Author(s)
N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)
C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:40df2f03-6bd0-472b-9aff-f3a29b9687a6
More Info
expand_more
expand_more
Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Issue number
8
Volume number
98
Pages (from-to)
084905-1-084905-12
No files available
Metadata only record. There are no files for this record.