Ge-on-Si: Single-crystal selective epitaxial growth in a CVD reactor
Conference Paper
(2012)
Author(s)
A. Sammak (TU Delft - Electronic Components, Technology and Materials)
Wiebe de Boer (TU Delft - Old - EWI Sect. ECTM)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:4129b6a3-defa-4413-8455-6cc81f89d09a
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
#3162-1-#3162-1
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