The development of micromachined humidity sensors based on a dielectric of porous silicon

Report (2002)

Authors

E Connolly Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2002

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation