Lensless single-shot dual-wavelength digital holography for industrial metrology
H. Shangguan (TU Delft - ImPhys/Kalkman group)
H. P. Urbach (TU Delft - ImPhys/Stallinga group)
Jeroen Kalkman (TU Delft - ImPhys/Kalkman group, TU Delft - ImPhys/Computational Imaging)
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Abstract
We demonstrate lensless single-shot dual-wavelength digital holography for high-speed 3D imaging in industrial inspection. Single-shot measurement is realized by combining off-axis digital holography and spatial frequency multiplexing of the two wavelengths on the detector. The system has 9.1 µm lateral resolution and a 50 µm unambiguous depth range. We determine the theoretical accuracy of off-axis dual-wavelength phase reconstruction for the case of shot-noise-limited detection. Experimental results show good agreement with the proposed model. The system is applied to industrial metrology of calibrated test samples and chip manufacturing.