Preparation of nanometer-scale windows in SiO2 for selective epitaxial growth of Si based divices

JWH Maes (TU Delft - Old organisation TN/TechnischeNatuurkunde voorm)

PW Lukey (External organisation)

T Zijlstra (TU Delft - QN/Kavli Nanolab Delft)

CCG Visser (External organisation)

J Caro (TU Delft - QN/Fysics of NanoElectronics)

Emile van der Drift (TU Delft - QN/Kavli Nanolab Delft)

Frans D. Tichelaar (TU Delft - OLD Virtual Materials and Mechanics)

S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)