Stress and texture in HIPIMS TiN thin films
Journal Article
(2009)
Author(s)
R Machunze (TU Delft - OLD Surface and Interface Engineering)
AP Ehiasarian (External organisation)
FD Tichelaar (QN/High Resolution Electron Microscopy)
G.C.A.M. Janssen (TU Delft - OLD Surface and Interface Engineering)
Research Group
OLD Surface and Interface Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:43cc16ed-0550-4390-a133-e1d7c2515129
More Info
expand_more
expand_more
Publication Year
2009
Research Group
OLD Surface and Interface Engineering
Volume number
518
Pages (from-to)
1561-1565
No files available
Metadata only record. There are no files for this record.