Optical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor
Conference Paper
(2007)
Author(s)
F jutzi (External organisation)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
G Pandraud (TU Delft - Electronic Instrumentation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:450d3b3d-bb9a-49a6-a11c-0579b9c93d18
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Publication Year
2007
Research Group
Electronic Instrumentation
Pages (from-to)
482-487
ISBN (print)
978 90 73461 49 9
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