Optical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor

Conference paper (2007)

Authors

F jutzi External organisation
DHB Wicaksono Electronic Instrumentation - EEMCS
G. Pandraud Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation