Electroless silver deposition in 100 nm silicon structures.

ten Kortenaar, MV; de Goeij, JJM; Kolar, ZI; Frens, G; Lusse, PJ; Zuiddam, M.R.; van der Drift, EWJM

Electroless silver deposition in 100 nm silicon structures.

Journal article (2001)

Authors

MV ten Kortenaar Old - sect Physical Chemistry (DCT/LFC)

JJM de Goeij Old - Section Radiochemistry

ZI Kolar Old - Section Radiochemistry

G Frens Old - sect Physical Chemistry (DCT/LFC)

PJ Lusse External organisation

M.R. Zuiddam QN/Kavli Nanolab Delft

EWJM van der Drift QN/Kavli Nanolab Delft

Research Group

Old - sect Physical Chemistry (DCT/LFC)

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Published Date

2001

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Research Group

Old - sect Physical Chemistry (DCT/LFC)

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