Advances in the Fabrication of On-chip Superconducting Integral Field Units for CMB and Line-Intensity Astronomy

Journal Article (2026)
Author(s)

Leon G.G.Olde Scholtenhuis (TU Delft - Tera-Hertz Sensing)

Daniela Perez Capelo (SRON–Netherlands Institute for Space Research)

Kenichi Karatsu (SRON–Netherlands Institute for Space Research)

David J. Thoen (SRON–Netherlands Institute for Space Research)

A. J. Van Der Linden (SRON–Netherlands Institute for Space Research)

Shahab O. Dabironezare (SRON–Netherlands Institute for Space Research, TU Delft - Tera-Hertz Sensing)

Louis H. Marting (TU Delft - Tera-Hertz Sensing)

Jochem J.A. Baselmans (SRON–Netherlands Institute for Space Research, TU Delft - Tera-Hertz Sensing)

Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)

Akira Endo (TU Delft - Tera-Hertz Sensing)

DOI related publication
https://doi.org/10.1109/TASC.2026.3674334 Final published version
More Info
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Publication Year
2026
Language
English
Journal title
IEEE Transactions on Applied Superconductivity
Issue number
6
Volume number
36
Downloads counter
7
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Abstract

Studying the polarization and spectral distortion of the Cosmic Microwave Background (CMB) in tandem with intensity fluctuations of the Cosmic Infrared Background (CIB) allows us to verify our assumptions on cosmic inflation and investigate the dynamics and evolution of galaxy clusters in the last 10 billion years. Because of its broadband emission and being an all-sky extended source, observing the entire CMB in detail is a very time-consuming and expensive exercise. Fortunately, in the last few years, the on-chip superconducting spectrometer technology has moved out of the lab and into the telescope. With its compact size and background-limited sensitivity, this family of instruments is particularly well-suited for fast and large area observations in a relatively unexplored range of the electromagnetic spectrum. However, recent examples of this technology do not yet reach the requirements needed for large spectroscopic and polarimetric surveys of the CMB. We formulate several of these requirements and introduce novel on-chip components and fabrication techniques. We introduce a cross-over to enable distinguishing signal polarization, minimize signal loss by locally optimized lithography of a coplanar-waveguide (CPW), lower the spectral resolution of microstrip filters by deposition of a dielectric layer, and increase the yield of the spectrometer array by removing individual line shorts. These together have culminated in the successful fabrication of a fourteen-spaxel IFU.