Characterization of LPCVD amorphous silicon carbide (a-SiC) as material for electron transparent windows
Journal Article
(2013)
Author(s)
B. Morana (TU Delft - Electronic Components, Technology and Materials)
G Pandraud (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Electronic Components, Technology and Materials)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.matchemphys.2013.02.013
To reference this document use:
https://resolver.tudelft.nl/uuid:47481ff3-c002-499b-912f-4d3b2860bca3
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
2-3
Volume number
139
Pages (from-to)
654-662
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