A DFT study of As doped WSe2

A NO2 sensing material with ultra-high selectivity in the atmospheric environment

Journal article (2021)

Authors

Zhaokun Wang Southern University of Science and Technology
Chenshan Gao Sky Chip Interconnection Technology Co, Chongqing University
Shuhan Hou Southern University of Science and Technology
Huiru Yang Southern University of Science and Technology
Ziyuan Shao Southern University of Science and Technology
Siyuan Xu Southern University of Science and Technology
H. Ye Electronic Components, Technology and Materials - EEMCS , Shenzhen Institute of Wide-bandgap Semiconductors, Southern University of Science and Technology
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2021

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

In this work, the adsorption of toxic gaseous NO2 and other gas molecules (NO, CO, CO2, N2, O2, SO2) on pristine and X-doped (X = Si, P, S, Te, As) two-dimensional (2D) WSe2 have been detailed studied by performing density functional theory (DFT) calculations. Calculation results of adsorption energies and adsorption distances demonstrate that As-doped 2D WSe2 (As-WSe2) exhibits high selectivity not only towards NO2, but also towards NO and SO2. However, the charge transfer between NO and the substrate is too small to detect, and chemical bond forms between SO2 and the substrate; both phenomena make As-WSe2 substrate more suitable as a substrate material of the NO2 sensor. To eliminate the interference of SO2 on the adsorption of NO2, coexistence of NO2 and SO2 is simulated. Results reveal that although the interaction between SO2 and the As-WSe2 substrate is stronger than that between NO2 and the substrate, SO2 molecule hardly interacts with the substrate when co-adsorbed with NO2. Besides, calculation results of DOS and PDOS further confirm the sensitivity of As-WSe2 towards NO2; and those of the recovery time also highlight the extremely fast recovery rate of As-WSe2 after adsorbing NO2. The present findings make As-WSe2 monolayer a potential substrate material of NO2 gas sensors used in the atmospheric environment.

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