High-aspect-ratio bulk micromachined vias contacts
Conference Paper
(2004)
Author(s)
NP Pham (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:4a65508a-8ad6-4f03-8ca4-9af7002b04b8
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
657-661
ISBN (print)
90-73461-43X
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