Substrate temperature and electron fluence effects on metallic films created by electron beam induced deposition

Journal article (2012)

Authors

S.G. Rosenberg External organisation
K Landheer External organisation
C.W. Hagen ImPhys/Charged Particle Optics
D.H. Fairbrother External organisation
Research Group
ImPhys/Charged Particle Optics
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Published Date

2012

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics