Co-development of stress and texture in reactive magnetron sputtered TiN films revealed by in situ film stress measurements

Journal article (2010)

Authors

R Machunze OLD Surface and Interface Engineering
F.D. Tichelaar QN/High Resolution Electron Microscopy
G.C.A.M. Janssen OLD Surface and Interface Engineering
Research Group
OLD Surface and Interface Engineering
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Published Date

2010

Language

English

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Research Group

OLD Surface and Interface Engineering