Co-development of stress and texture in reactive magnetron sputtered TiN films revealed by in situ film stress measurements

Machunze, R; Tichelaar, Frans D.; Janssen, G.C.A.M.

Co-development of stress and texture in reactive magnetron sputtered TiN films revealed by in situ film stress measurements

Journal article (2010)

Authors

R Machunze OLD Surface and Interface Engineering

Frans D. Tichelaar

G.C.A.M. Janssen OLD Surface and Interface Engineering

Research Group

OLD Surface and Interface Engineering

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Published Date

2010

Language

English

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Research Group

OLD Surface and Interface Engineering

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