Co-development of stress and texture in reactive magnetron sputtered TiN films revealed by in situ film stress measurements
Journal Article
(2010)
Author(s)
R Machunze (TU Delft - OLD Surface and Interface Engineering)
F.D. Tichelaar (QN/High Resolution Electron Microscopy)
GCAM Janssen (TU Delft - OLD Surface and Interface Engineering)
Research Group
OLD Surface and Interface Engineering
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Publication Year
2010
Language
English
Research Group
OLD Surface and Interface Engineering
Volume number
206
Pages (from-to)
1313-1319
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