Static crack growth and fatigue modeling for silicon MEMS
Conference Paper
(2011)
Author(s)
WM van Spengen (TU Delft - Mechanical Engineering)
Research Group
Micro and Nano Engineering
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Publication Year
2011
Language
English
Research Group
Micro and Nano Engineering
Bibliographical Note
neo
Pages (from-to)
285-288
Publisher
Twente University
ISBN (print)
978 90 816737 1 6
Event
21st Micromechanics and Micro systems Europe Workshop (2010-09-26 - 2010-09-29), Enschede
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